Ultra-thin stage with electric actuators placed on the single plane
- It makes the center of gravity of the entire equipment lower enough.
- Various table movements are possible by operating three actuators placed on the single plane individually.
Operating Principle
Driving the U axis moves the table in the X direction.
Driving the V and W axes the same amount in the same direction moves the table in the Y direction.
Driving the V and W axes the same amount in the same direction while driving the U axis moves the table diagonally.
Example of rotating the table using the table center as the axis of rotation (θ axis).
Example of rotating the table using an arbitrary point as the axis of rotation (θ axis).
NAF3series Type-C
NAF3 Series Type-C uses “preloaded double slide structure”, which places an intermediate plate sandwiched between two upper and lower plates for 3-axis actuator (U/V/W) and slide section.
Lots of balls placed between each plate allow smooth planar rolling motion, “Preloaded double slide structure” makes stages thin, compact and highly rigid for highly accurate positioning.
NAF3series Type-D
Type-D does not use “preloaded double slide structure”, Type-D possesses unique advantages with a wide range of motion and a larger central opening.
Applications for NAF3 series
- semiconductor manufacturing equipment, testing equipment.
- Panel joining and mounting equipment(LCD, EL, touch panel, solar cell).
- Printing equipment(Chip components, PCB, FPC).
- Microscope stage and so forth.
System Configuration Drawing
Product Specifications
NAF3C-10-01P
*1 It is feasible for each axis to commence its movement simultaneously from the origin position(center of the top table), enabling a full stroke operation, if required.
*2 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*3 The driver for the stepping motor is of an open-loop configuration.
*4 There are 3 photo micro sensors on drive module on each axis.
NAF3C-16K00
*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.
NAF3C-20K01
*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.
NAF3C-30K00
*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.
NAF3C-40K00
*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.
NAF3D-40K02
*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.
Model number notation
